TY  - JOUR
A1  - Jafri, I 
A1  - Busta, H 
A1  - Walsh, S 
T1  - Critical Point Drying and Cleaning for MEMS Technology.
Y1  - 1999/09/
N1  - 68D99050
JF  - MICROMACHINING AND MICROFABRICATION
VL  - 3880
ER  -